Propylene glycol methyl ether acetate (PGMEA, 1-methoxy-2-propanol acetate) is a P-type glycol ether used in inks, coatings, and cleaners. It is sold by Dow Chemical under the name Dowanol PMA,[3] by Shell Chemical under the name methyl proxitol acetate,[4][5] and by Eastman under the name PM Acetate.[6]
In the semiconductor industry, PGMEA is a commonly used solvent, primarily for the application of surface adherents such as Bis(trimethylsilyl)amine (HMDS) on silicon wafers.[7] The compound is often the most abundant airborne, molecular contamination (AMC) in semiconductor cleanrooms,[8] due to its evaporation into ambient air.